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RF Plasma Pecvd System
RF PLASMA PECVD SYSTEM
Rf frequency 13.56 Mz , Power rating 600 watt with matching network
SS Reactor , Rotary pump , throttle valve , Pirani vacuum gauge and High Pressure gauge , Four line gas manifold with MFC and having methane , hydrogen , argon gases etc.
Suitable to grow various thin film materials Silicon and Carbon based