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Microwave ECR system

Microwave ECR system
Microwave ECR system
Product Code : 01
Brand Name : OMICRON SCIENTIFIC EQUIPMENT CO.
Product Description

Microwave (2.45 GHz) ECR system

PLC controlled microwave ECR system

UHV SS vacuum chamber complete with vacuum pumping station including turbo pump based pumping

Four line gas manifold with MFC

1.5 Kilowatt microwave power generator with forward and reflected power measurement, three stub tuner and special applicator with mode transfer facility

The system is suitable for high rate etching oxides like silicon oxide and synthetic diamond deposition including Nano-diamond aligned carbon nanotubes & graphene


OMICRON SCIENTIFIC EQUIPMENT CO.

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  • Contact Details
  • OMICRON SCIENTIFIC EQUIPMENT CO.
  • 309, Vardhman Sudarshan Plaza, Plot No. 4, MLU, Sector-5, Dwarka, New Delhi - 110075, India
  • Mr. Sanjeev Kumar Dixit (Director)
  • Dr. P. N. Dixit